Pre-bonding particle inspection system (with arc edge)
This system includes two stations. The first station: particle detection, including three cameras (one for detecting plane area and two for detecting hot bending arc area) and two ultra-bright light sources (one for dark field and one for bright field). The second station: re-inspection, including a camera, a set of microscopic imaging optical components, a set of precision sliding table, and re-inspection confirmation for the defects detected in the first station. After two stations, the final quality judgment result will be given according to the detection standard.
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